AZO Targets: Indium-Free Transparent Conductive Solutions for Solar and Display
Aluminum-doped zinc oxide (AZO) targets are emerging as indium-free transparent conductive materials for sputtering applications. AZO films offer high visible light transmittance, good electrical conductivity, and excellent stability in hydrogen plasma environments, making them suitable for thin-film solar cells, flat panel displays, and energy-saving glass.
AZO targets are composed of zinc oxide and aluminum oxide, typically in a ZnO:Al₂O₃ mass ratio of 98:2, with a purity of ≥99.95% and a typical relative density of ≥99.5% (theoretical density approximately 5.57 g/cm³). They are available in rotary and planar specifications. Manufacturing processes include spraying, cold isostatic pressing (CIP) combined with high-temperature sintering, and bonding. The CIP process ensures uniform density and crack-free green compacts, while high-temperature sintering achieves full densification.
AZO targets are applicable in solar photovoltaics (front electrodes for thin-film cells), flat panel displays (exploratory applications for transparent conductive layers, subject to customer process validation), energy-saving and smart glass (as dielectric or planarization layers in Low-E glass stacks, subject to membrane design and process validation), and selected semiconductor-related devices.
UV Tech Material LTD. (UVTM), a national-level SRUI "Little Giant" enterprise established in 2003, offers AZO targets with customized specifications. The company has developed comprehensive capabilities in cold isostatic pressing, high-temperature sintering, and bonding processes. Supported by over 100 patents and a 35,000+ square meter standardized production base, UVTM has achieved large-scale manufacturing for these processes. Products have entered overseas markets including Japan, South Korea, Europe, and the United States.
UVTM provides full-chain technical support from material customization and backplane bonding to sputtering applications.
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