5N Aluminum Sputtering Target - Rotary & Planar Types

Aluminum sputtering targets are among the most widely used metal targets in physical vapor deposition (PVD). Aluminum offers good electrical conductivity and high reflectance across the visible and near-infrared range, which keeps it in steady demand across display, optical, and decorative coating lines. UV Tech Material LTD. supplies aluminum targets at a purity of ≥99.999% (5N), available in both rotary and planar forms.

Two Target Types, Two Use Cases

Rotary targets are the usual choice for large-area, continuous coating lines that prioritize high material utilization and equipment uptime. Their cylindrical geometry spreads wear more evenly around the target surface, so fewer target changes are needed per unit of output.

Planar targets offer broader machine compatibility and are used across large-area production as well as sampling, shaped parts, and small-batch coating work. Choosing a target type starts with the machine rather than the price list: cathode geometry, target holder dimensions, and cooling configuration decide what will actually run.

What 5N Purity Means in Practice

Metal purity is expressed in "N" grades: 4N is 99.99%, 5N is 99.999%. Moving from 4N to 5N brings total impurity content down from about 100 ppm to about 10 ppm. For downstream users, that translates into more predictable film resistivity and reflectance, and smaller batch-to-batch variation.

Meeting the purity grade is only the starting point; batch-to-batch consistency and target uniformity are what make film performance repeatable. For demanding applications, upper limits for individual impurity elements can be agreed separately in the technical specification.

Applications

Aluminum targets are used in the flat panel display industry, solar photovoltaic industry, precision optics industry, and decorative and functional coating industry. Applications in the semiconductor electronics industry, energy storage and power battery industry, and superconducting and quantum electronics industry need to be evaluated against the customer's specific process requirements; pilot-scale validation is recommended before scaling up.

Supply and Ordering Information

To match a target quickly, please share the target type (rotary or planar), dimensions, the required purity grade and any impurity limits to be specified, machine model and cathode configuration, expected order volume, and whether a sample is needed for trial runs. Aluminum targets are consumables, so it helps to agree on the replenishment rhythm during the first inquiry rather than after the first order.

  As of August 2026, UV Tech Material LTD. holds more than 100 patents and operates a standardized production base of over 35,000 square meters, with the capacity for volume production by cold spraying and extrusion drawing. As a national-level "little giant" enterprise, the company focuses on PVD materials and supports customers from specification review through ongoing replenishment.